白光共軛焦輪廓儀
簡要描述:產品類型:白光、共軛焦、非接觸μSurf結合CCD的影像攝取,以有許多孔洞的旋轉盤取代偵測器的孔洞,再將物鏡垂直移動,以類似斷層攝影方式,精確量測物體高度(如下圖所示)。 由于使(shi)用了共軛(e)焦的方法,在測量漸(jian)變較大的高(gao)度時,跟(gen)其他同類公司產(chan)品使(shi)用較多的干涉法相比,可(ke)以精確(que)量測物體高(gao)度,建(jian)立3D立體影像(xiang),優勢相當明顯。
- 產(chan)品型號:Nanofocus μSurf
- 廠(chang)商(shang)性質:代理商
- 更新時間:2018-05-14
- 訪 問 量:1096
技術參數
Measuring head CX CI
Image acquistion module BM 512 Digital camera with progressive-
scan technology, up to 25fps,
512 x 512 Pixel, 8bit, Firewire Fast digital camera with progressive-
scan technology, up to 58fps,
512 x 512 Pixel, 12 Bit, Firewirs
light source, adjustable Halogen light source
(LS 100) Powerfull-Xe-light source
(LX 100, LX 180)
Scan modules
x, y-axis module MS 50 Precision x, y-table, 50 x 50mm, resolution 0.1μm
z-axis module ZM 100 Precision scanning module, range 100mm, resolution 0.1μm
z-axis module NV 350 - Fast precision scanning module (Piezo),
measuring range 350μm, resolution < 1nm
Optic modules1) 1600 S 800 L / S / XS 320 L / S / XS 160 L / S
Measurement area (x/y)(um)2
(XY測量范圍) 1600 x 1600 800 x 800 320 x 320 160 x 160
Numerical aperture
(NA值) 0.3 0.4 / 0.46 / 0.6 0.5 / 0.8 / 0.95 0.8 / 0.95
Working distance(mm)
Z方向測量范圍 10.1 12 / 3.1 / 0.9 10.6 / 0.66 / 0.3 3.4 / 0.31
Resolution in z-direction(nm)CX
(Z方向范圍分辨率) CI2) 50
20 35 / 30 / -
6 / 5 / 4 25 / 15 / -
4 / 2 / 2 -
2 / 1
Resolution in x,y-direction
(XY分辨率) 2.9 1.5 0.6 0.31
1) L : long working distance, S : normal working distance, XS : short working distance, 2) noise level (only with NV350)
:
:admin@shnti.com
- 上一篇:NanoFocus μScan激光掃描輪廓儀
- 下一篇:氧化鋁納米多孔膜